Multi-Pitch Grid Test Sample: Nine Patterns on One Chip

Features

• Nine patterned fields in a 3 × 3 layout, each a different size
• Mix of square grids for varied calibration and tip-check geometries
• Clearly visible in the AFM’s optical view, so the right pattern is easy to find
  

Applications

• Calibrate X and Y scanner scale against known feature spacing
• Check linearity, distortion, and drift across the scan range
• Verify scan-size accuracy before and after servicing or changing scanners
• Inspect tips with sharp feature edges for blunting or damage
• Compare probes, scan settings, and instruments on the same structures
• Train new users on a high-contrast, easy-to-find sample