Custom Design - Prototyping - Production
From Concept To Cleanroom
Production grade MEMS foundry providing custom design and in-house fabrication for AFM, sensing, photonics, and quantum applications. Whether you’re developing a new device, refining an existing design, or need a component you can’t buy off the shelf, we work directly with you from initial concept through fabrication.
You’ll work directly with the engineers designing and building your device. As a small facility, we offer close collaboration and the flexibility to adapt designs and processes to your project’s needs.
Applications We Support
- AFM & Custom Probes: Custom probe development and fabrication from specialized measurment applications
- Sensors: MEMS design and fabrication for custom sensing devices
- Photonics: Collaborative development of MEMS structures and specialty components for photonics applications.
- Quantum Computing: Collaborative development of MEMS structures and specialty components for quantum research and technology.
Capabilities
- Metal sputter deposition
- Dielectric sputter deposition
- Plasma Cleaning (O2/Ar)
- Reactive Ion etching (RIE)
- Deep Reaction Ion Etching (DRIE)
- Wet & Dry Etching
- Deep Anisotropic Etching
- Lithography (IR back side alignment)
- Rapid thermal processing (RTP)
- Vacuum & Gas Sintering
- Vacuum & Gas Annealing
- Oxidizing
- Doping
- Metrology
- Quality Control
- Packaging (Wire bonding, Dicing)
- Atomic Force Microscopy (AFM)
- Scanning Electron Microscopy (SEM)