MEMS Foundry

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Custom Design - Prototyping - Production
From Concept To Cleanroom

Production grade MEMS foundry providing custom design and in-house fabrication for AFM, sensing, photonics, and quantum applications. Whether you’re developing a new device, refining an existing design, or need a component you can’t buy off the shelf, we work directly with you from initial concept through fabrication.

You’ll work directly with the engineers designing and building your device. As a small facility, we offer close collaboration and the flexibility to adapt designs and processes to your project’s needs.

Applications We Support
  • AFM & Custom Probes: Custom probe development and fabrication from specialized measurment applications

  • Sensors: MEMS design and fabrication for custom sensing devices

  • Photonics: Collaborative development of MEMS structures and specialty components for photonics applications.

  • Quantum Computing: Collaborative development of MEMS structures and specialty components for quantum research and technology. 

Capabilities

  • Metal sputter deposition
  • Dielectric sputter deposition
  • Plasma Cleaning (O2/Ar)
  • Reactive Ion etching (RIE)
  • Deep Reaction Ion Etching (DRIE)
  • Wet & Dry Etching
  • Deep Anisotropic Etching
  • Lithography (IR back side alignment)
  • Rapid thermal processing (RTP)
  • Vacuum & Gas Sintering
  • Vacuum & Gas Annealing
  • Oxidizing
  • Doping
  • Metrology
  • Quality Control
  • Packaging (Wire bonding, Dicing)
  • Atomic Force Microscopy (AFM)
  • Scanning Electron Microscopy (SEM)